Title:
OPERATION OF VACUUM TREATING DEVICE
Document Type and Number:
Japanese Patent JP2674591
Kind Code:
B2
Abstract:
PURPOSE: To maintain the exhaustion performance, to prevent the transpiration of a trapped gas and to reduce the consumption of gaseous argon by keeping a cooling plate at low temp. at all times.
CONSTITUTION: This device is provided with a temp.-controllable cooling plate 10 to be cooled by a refrigerator 8 furnished to an exhaust pipe connecting a vacuum treating chamber to be supplied with a treated gas and a vacuum pump 5 and a gate valve disposed between the exhaust pipe and pump 5 and adjusting the flow rate of the exhaust from the vacuum treating chamber, the device is evacuated to a specified high vacuum, the cooling plate 10 is controlled to a specified temp., a gas having a higher b.p. than the temp. of the cooling plate 10 is adsorbed on the cooling plate and removed, and then the amt. of the remaining gas to be exhausted is adjusted by controlling the opening degree of the gate valve.
Inventors:
Norihide Saho
Yoshimatsu
Matsuda Kigen
Takada Tadashi
Yoshimatsu
Matsuda Kigen
Takada Tadashi
Application Number:
JP453196A
Publication Date:
November 12, 1997
Filing Date:
January 16, 1996
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
B01J3/00; B01J3/02; C23C14/34; H01L21/203; (IPC1-7): B01J3/02; B01J3/00; C23C14/34; H01L21/203
Domestic Patent References:
| JP54154814A | ||||
| JP5533059A | ||||
| JP57157080A |
Attorney, Agent or Firm:
Ogawa Katsuo
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