Title:
温度制御装置を有する光学アセンブリ
Document Type and Number:
Japanese Patent JP5033265
Kind Code:
B2
Abstract:
A temperature-control device is used for controlling the temperature of an optical assembly with at least one optical body, the temperature of which is to be controlled, with at least one optical surface which can be acted upon by a heat flow. The temperature-control device has a heat sink to receive a heat flow, which is emitted by the optical body or a transmission body which is in thermal connection with the optical body. The heat sink is arranged adjacent to a peripheral region of the optical surface. The temperature-control device has a heating mechanism with at least one heating body, which is arranged adjacent to the optical body. The heating body is connected via a physical heat bridge to the heat sink.
Inventors:
Armin Sheppach
Timo royfer
Timo royfer
Application Number:
JP2011527237A
Publication Date:
September 26, 2012
Filing Date:
September 14, 2009
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G02B5/08; G02B7/182; G02B7/198; G03F7/20; H01L21/027
Domestic Patent References:
| JP2004281653A |
Attorney, Agent or Firm:
Kenji Sugimura
Tatsuya Sawada
Groundwork Kenichi
Tatsuya Sawada
Groundwork Kenichi