Title:
OPTICAL AXIS ADJUSTING METHOD
Document Type and Number:
Japanese Patent JPH0518747
Kind Code:
A
Abstract:
PURPOSE:To simplify the adjustment of optical axes between a light source and an objective lens in a focal error detecting type displacement gage or the like so as to improve efficiency. CONSTITUTION:An optical system is provided with a light source 1 for irradiating focus beams to a measured object, and the objective lens 2 so as to obtain the information of the measured object from the reflected light from the measured object. At the time of bringing the axis of the light source 1 in line with the axis of the objective lens 2 in this optical system, a total reflection mirror 3 is provided in the focal position of the objective lens 2 after adjusting the angular two-direction axes of the light source 1 and objective lens 2. A beam splitter 5 is then provided between the light source 1 and the objective lens 2 to lead the reflected light at the total reflection mirror 3 to a quartered detector 4, and the linear two-direction optical axes of the light source 1 and objective lens 2 are adjusted.
Inventors:
MOBARA MASAICHI
Application Number:
JP17249391A
Publication Date:
January 26, 1993
Filing Date:
July 12, 1991
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
G01C3/06; G01C3/00; G02B27/62; G11B7/08; (IPC1-7): G01C3/06; G02B27/62; G11B7/08
Attorney, Agent or Firm:
Mitsuishi Toshiro