Title:
OPTICAL CVD METHOD
Document Type and Number:
Japanese Patent JPS62207872
Kind Code:
A
Abstract:
PURPOSE: To increase the adhesive power of a thin film formed on a substrate by irradiating laser light on the substrate exposed to a gas causing an optical CVD reaction in two stages at high and low intensities.
CONSTITUTION: In the 1st stage, laser light is irradiated on a substrate exposed to a gas causing an optical DVD reaction at a higher intensity than the conventional intensity so as to increase the adhesive power of a formed thin film to the substrate. In the 2nd stage, laser light is irradiated at the conventional intensity. Since laser light is irradiated on the substrate in two stages at different intensities as mentioned above, a film having strong adhesive power is obtd. by CVD.
Inventors:
MORISHIGE YUKIO
Application Number:
JP4961686A
Publication Date:
September 12, 1987
Filing Date:
March 07, 1986
Export Citation:
Assignee:
NEC CORP
International Classes:
C23C16/18; C23C16/16; C23C16/48; (IPC1-7): C23C16/18; C23C16/48
Domestic Patent References:
| JPS58119334A | 1983-07-15 |
Attorney, Agent or Firm:
Uchihara Shin
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