To integrate a probe while reducing the size by bonding a protrusion having a micro opening onto a displaceable support supported on a substrate thereby forming the micro opening with high reproducibility.

The optical detection or irradiation probe comprises a displaceable support (lever) 10 supported on a substrate 21, and a protrusion 5 having a micro opening 6 formed on the support 10. The protrusion 5 is bonded through a bonding layer 26 onto the support 10. The micro opening 6 is made in a light shielding layer (metal layer) 7 on the surface of the protrusion 5 made of a light transmitting material. A waveguide 28 connects a laser 20 (or a light receiving unit) optically with the protrusion 5. A micro opening part 6 for detecting or irradiating evanescent light can be formed easily at the forward end of the probe and the laser 20, the light receiving unit, the waveguide 28, and the like, can be integrated and reduced in size. Consequently, resolution is enhanced in surface observation.