Title:
OPTICAL DISPLACEMENT METER
Document Type and Number:
Japanese Patent JP2002286414
Kind Code:
A
Abstract:
To provide an optical displacement meter that is simple in structure and can be made small, and furthermore, can reduce the cost and is superior in reading accuracy.
A flux of light from an LD(Laser diode) 101 as a linear light is emitted to an object 107 to be inspected, and the reflection light or diffused light is made incident on a PSD (light receiving means) 115, and the surface displacement of the object 107 is read on the basis of the incident position of the light flux in the PSD 115. In such an optical displacement meter, the light flux emitted form the LD 101 is directly led to a cylindrical lens 105 as an element having a directionality of converging.
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Inventors:
BABA NOBUYUKI
KUROKAMA RIYUUJI
KUROKAMA RIYUUJI
Application Number:
JP2001082553A
Publication Date:
October 03, 2002
Filing Date:
March 22, 2001
Export Citation:
Assignee:
KONISHIROKU PHOTO IND
International Classes:
G01B11/00; G01B11/02; G01B11/24; G01C3/06; (IPC1-7): G01B11/00
Attorney, Agent or Firm:
Fujishima Ijima (1 outside)