Title:
OPTICAL ELEMENT, ILLUMINATION OPTICAL SYSTEM, AND MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2011186383
Kind Code:
A
Abstract:
To provide an optical element, an illumination optical system, and a measuring device capable of obtaining a highly accurate and highly strong spherical wave.
The optical element includes: a substrate 10 which allows transmission of light; a metal thin film 11 formed on the surface of the substrate 10, and a scattering section 12 which is formed on the metal thin film 11 and also converts surface plasmon, which is excited when light enters the surface of the substrate 10 from the inside of the substrate 10 under total reflection conditions, into a spherical wave and emits the same.
Inventors:
FUKUTAKE NAOKI
MORI DAISUKE
MORI DAISUKE
Application Number:
JP2010054318A
Publication Date:
September 22, 2011
Filing Date:
March 11, 2010
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B5/00; G01B9/02; G01J9/00; G01M11/02
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi
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