To provide an optical element comprising a surface emission laser having good high frequency characteristics, and a light receiving element for detecting a part of laser light emitted from the surface emission laser.
The optical element 100 comprises a surface emission laser 130, a light receiving element 120 for detecting a part of laser light emitted from the surface emission laser 130. The surface emission laser comprises a first mirror 102 formed above a substrate 101, an active layer 103 formed above the first mirror, and a second mirrors 104 and 108 formed above the active layer. The light receiving element comprises a light absorption layer 111 formed above the second mirror, a first impurity containing layer 114 formed above the light absorption layer, a second impurity containing layer 115 formed above the light absorption layer, a first electrode 112 formed above the first impurity containing layer, and a second electrode 113 formed above the second impurity containing layer.
SATO JUNJI
JP2000183444A | 2000-06-30 | |||
JP2003121673A | 2003-04-23 | |||
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JP2002100829A | 2002-04-05 | |||
JPH04363083A | 1992-12-15 | |||
JP2003249714A | 2003-09-05 | |||
JPH10233557A | 1998-09-02 |
Mitsue Obuchi
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