Optical fault imaging device

Title:

Optical fault imaging device

Document Type and Number:

Japanese Patent JP5995810

Kind Code:

B2

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Inventors:

Takushi Yoshida

Application Number:

JP2013192364A

Publication Date:

September 21, 2016

Filing Date:

September 17, 2013

Export Citation:

Assignee:

Canon Inc

International Classes:

A61B3/10; G01N21/17

Domestic Patent References:

Attorney, Agent or Firm:

Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu

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