Title:
Optical image measuring device
Document Type and Number:
Japanese Patent JP6231958
Kind Code:
B2
Inventors:
Kentaro Osawa
Naoko Senda
Daisuke Tomita
Naoko Senda
Daisuke Tomita
Application Number:
JP2014167295A
Publication Date:
November 15, 2017
Filing Date:
August 20, 2014
Export Citation:
Assignee:
Hitachi LG Data Storage Co., Ltd.
International Classes:
G01N21/17; G01N21/21
Domestic Patent References:
JP2014142281A | ||||
JP2001321340A |
Foreign References:
US20140204388 | ||||
US20130107268 |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe