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Title:
層および表面特性の光学測定方法およびその装置
Document Type and Number:
Japanese Patent JP4909480
Kind Code:
B2
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Inventors:
Rosenthal Peter A.
X you jazz han
Application Number:
JP2001523592A
Publication Date:
April 04, 2012
Filing Date:
September 15, 2000
Export Citation:
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Assignee:
MKS Instruments Incorporated
International Classes:
G01N21/35; G01B11/06; G01N21/21; G01N21/27; G01N21/33; H01L21/66
Domestic Patent References:
JP3172728A
JP590354U
JP4277643A
JP518716A
Foreign References:
US5243405A
Attorney, Agent or Firm:
Kazunori Saito



 
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