Title:
光学測定システムおよび光学測定方法
Document Type and Number:
Japanese Patent JP7199093
Kind Code:
B2
Abstract:
The present invention relates to an optical measuring system capable of measuring optical characteristics at higher precision even for a sample in which measurement accuracy may be degraded by a conventional optical measuring device. The optical measuring system of the present invention comprises: a light source for generating measurement light for irradiating a sample; a spectroscopic detector for receiving reflected or transmitted light generated from the sample by the measurement light; and a processing device in which a detection result of the spectroscopic detector is inputted. The processing device can execute the processes of: calculating a first spectrum based on the detection result of the spectroscopic detector; specifying a section in which a change in amplitude for a wavelength satisfies a predetermined condition in the first spectrum; and calculating optical characteristics of the sample by using a second spectrum from which information of the specified section has been removed from the first spectrum.
Inventors:
Munehiro Okamoto
Daisuke Inano
Koichi Morimoto
Toichi Taguchi
Tomohiko Kamemoto
Daisuke Inano
Koichi Morimoto
Toichi Taguchi
Tomohiko Kamemoto
Application Number:
JP2019013559A
Publication Date:
January 05, 2023
Filing Date:
January 29, 2019
Export Citation:
Assignee:
Otsuka Electronics Co., Ltd.
International Classes:
G01B11/06
Domestic Patent References:
| JP10307009A | ||||
| JP2002343842A | ||||
| JP2001280920A | ||||
| JP2009092454A | ||||
| JP2011196766A | ||||
| JP2018205132A |
Attorney, Agent or Firm:
Patent Attorney Fukami Patent Office