Title:
光学測定装置
Document Type and Number:
Japanese Patent JP4659996
Kind Code:
B2
Inventors:
Yuji Akishiba
Application Number:
JP2001079066A
Publication Date:
March 30, 2011
Filing Date:
March 19, 2001
Export Citation:
Assignee:
Keyence Corporation
International Classes:
G01B11/00; G01B11/02; G01B11/14; G01B11/24
Domestic Patent References:
| JP5026629A | ||||
| JP9079819A | ||||
| JP4145306A | ||||
| JP7208934A | ||||
| JP11337315A | ||||
| JP3115909A |
Attorney, Agent or Firm:
Yoshito Fukushima