Title:
OPTICAL MEASUREMENT SYSTEM, OPTICAL MEASUREMENT METHOD AND MEASUREMENT PROGRAM
Document Type and Number:
Japanese Patent JP2022147223
Kind Code:
A
Abstract:
To provide a technique for reducing errors due to temperature change and the like generated in a spectroscopic detector, etc.SOLUTION: An optical measurement system comprises: a light source; a spectroscopic detector; a reference sample configured to maintain its properties to temperature changes; a changeover mechanism changing over between a first optical path irradiating a sample as measuring object with light from the light source and guiding the light generated in the sample to the spectroscopic detector and a second optical path irradiating the reference sample with light from the light source and guiding the light generated in the reference sample to the spectroscopic detector; and a calculation part that calculates a measured value of the sample, by performing correction processing based on a change between a first detection result outputted by the spectroscopic detector by irradiating the reference sample with the light from the light source at a first clock time and a second detection result outputted by the spectroscopic detector by irradiating the reference sample with the light from the light source at a second clock time, from a third detection result outputted by the spectroscopic detector by irradiating the sample with the light from the light source at a third clock time temporally close to the second clock time.SELECTED DRAWING: Figure 3
Inventors:
KAWAGUCHI SHIRO
NAKAJIMA KAZUYA
TAKIZAWA YUTO
MAEDA GORO
NAKAJIMA KAZUYA
TAKIZAWA YUTO
MAEDA GORO
Application Number:
JP2021048379A
Publication Date:
October 06, 2022
Filing Date:
March 23, 2021
Export Citation:
Assignee:
OTSUKA DENSHI CO LTD
International Classes:
G01B11/06
Attorney, Agent or Firm:
Patent Attorney Fukami Patent Office