Title:
OPTICAL MODULATOR AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP3963819
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an optical modulator sufficiently independent of polarization by suppressing excessive diffusion of Ti in a direction horizontal to a crystal substrate surface and a method for manufacturing the same.
SOLUTION: The optical modulator is constructed by forming a Ti diffusion waveguide on the X cut surface of a LiNbO3 crystal substrate in the Z-axis direction of the LiNbO3 crystal substrate. In manufacturing an X cut Z propagating optical modulator, slits 5 to suppress the diffusion of a Ti film 10 in a horizontal direction are formed with etching between the Ti diffusion waveguide 3 and the LiNbO3 crystal substrate 2. Widths of the slits 5 are 0.1-3μm. Depths of the slits 5 are 5-10μm measured from the LiNbO3 crystal substrate surface. As a result, the slits 5 become separation parts and suppress the diffusion of Ti in the horizontal direction having diffusion speed of two times or more than that in the vertical direction of the LiNbO3 crystal. Consequently the X cut Z propagating optical modulator with no polarization dependency and the method for manufacturing the same are obtained.
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Inventors:
Shiro Kazuki
Application Number:
JP2002313641A
Publication Date:
August 22, 2007
Filing Date:
October 29, 2002
Export Citation:
Assignee:
Showa Densen Device Technology Co., Ltd.
International Classes:
G02F1/035; G02F1/03; (IPC1-7): G02F1/035; G02F1/03
Domestic Patent References:
| JP8086990A | ||||
| JP2001033740A | ||||
| JP5249335A | ||||
| JP10078523A | ||||
| JP1314207A | ||||
| JP4005615A | ||||
| JP2002040381A |
Attorney, Agent or Firm:
Yuji Kato