OPTICAL MODULATOR - ANRITSU CORP

Title:

OPTICAL MODULATOR

Document Type and Number:

Japanese Patent JP2009048087

Kind Code:

A

Abstract:

To provide an optical modulator which has a high-performance optical modulation characteristic and has improved stability.

The optical modulator includes: a z-cut LN substrate 1; an optical waveguide 3 formed on the substrate; an SiO2 buffer layer 2 formed on the upper side of the substrate; a conductive layer 5 laminated on the SiO2 buffer layer; and a traveling wave electrode 4 which is disposed on the upper side of the conductive layer and includes a center conductive body 4a and earth conductive bodies 4b, 4c; wherein the traveling wave electrode is composed of a modulation part 17 of modulating a phase of light that is guided through the optical waveguide, an input part 18 and an output part 19, and ridge parts 45, 46 are formed with recessed parts 31, 32, 33 which are disposed by digging down at least a part of the area where electric field strength of a high-frequency electric signal propagated through the modulation part is strong on the substrate. Therein, the substrate has recessed parts 34, 35 formed by digging down at least a part between the center conductive body and the earth conductive bodies on the input part and the output part.

Inventors:

MATSUMOTO SATOSHI
KONO KENJI
NANAMI MASAYA
SATO YUJI
UCHIDA YASUJI
IGARASHI NOBUHIRO
NAKAHIRA TORU
KAWAMO EIJI

Application Number:

JP2007216126A

Publication Date:

March 05, 2009

Filing Date:

August 22, 2007

Export Citation:

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