Title:
OPTICAL SCANNER AND ABNORMALITY DETECTION METHOD
Document Type and Number:
Japanese Patent JP2023163946
Kind Code:
A
Abstract:
To provide an optical scanner and an abnormality detection method allowing high-speed detection of an abnormal operation of a mirror during the operation.SOLUTION: An optical scanner of the present disclosure comprises: a micromirror device including a mirror that has a reflection surface reflecting light and can be swung around at least one axis, an actuator that swings the mirror, and a piezoelectric element that generates and outputs an electromotive force through the swinging of the mirror; a control unit that controls the operation of the actuator; and an abnormality detection device that detects an abnormal operation of the mirror based on the amount of variation over time of an output signal from the piezoelectric element.SELECTED DRAWING: Figure 6
Inventors:
ABE MASAAKI
NAONO TAKAYUKI
NISHIURA YOSUKE
NAONO TAKAYUKI
NISHIURA YOSUKE
Application Number:
JP2022075198A
Publication Date:
November 10, 2023
Filing Date:
April 28, 2022
Export Citation:
Assignee:
FUJIFILM CORP
International Classes:
G02B26/10
Attorney, Agent or Firm:
Patent Attorney Corporation Taiyo International Patent Office