OPTICAL SCANNER

Japanese Patent JP3680896

B2

PROBLEM TO BE SOLVED: To make an optical scanner have a simple transmission optical system in the optical scanner on which a light beam is made incident twice by making mirrors form ing a bent optical path have the function of the rear group in the afocal optical system of a transmission optical system and the function of a lens for compensating a plane tilt and to reduce the number of sheets of the lenses.
SOLUTION: This optical scanner is provided with a light beams light source, a rotary polygon mirror 4 having plural reflecting surfaces reflectingly deflecting a light beam from the light source, a transmission optical system 22 making the light beam reflectingly deflected by the first reflecting surface 5 of the rotary polygon mirror 4 transmissively incident on the second reflecting surface 6 of the mirror 4 and a scanning system making the light beam reflectingly deflected by the second reflecting surface 6 form and scan a beam spot on a surface to be scanned and is made to include reflection mirros which have curved faces 10, 13 in the transmission optical system.

Takada ball
Nozomi Inoue
Hama Takashi

JP24097597A

August 10, 2005

September 05, 1997

Click for automatic bibliography generation  

Seiko Epson Corporation

G02B5/10; G02B26/10; G02B26/12; (IPC1-7): G02B26/10; G02B5/10

JP60239706A
JP57196270A
JP53097448A
JP6003616A
JP51032340A
JP9159963A
JP9203875A

US4230394

Hiroshi Nagisawa
Ryukichi Abe
Hirukawa Masanobu
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Akira Yonezawa

Previous Patent: WAFER HOLDING METHOD FOR WAFER POLISHING DEVICE

Next Patent: PROCESSING SOLUTION DISCHARGE NOZZLE OF SUBSTRATE TREATING DEVICE