Title:
光学半導体素子
Document Type and Number:
Japanese Patent JP4579352
Kind Code:
B2
Abstract:
An optical semiconductor component (10) includes a substrate (11) having a surface (12), a photodetector (13) supported by the substrate (11), and a seismic mass (21) overlying the surface (12) of the substrate (11) and overlying a portion of the photodetector (13). The seismic mass (21) has a hole (22) overlying a base region (32) of the photodetector (13) wherein the seismic mass (21) is movable relative to the substrate (11) and the photodetector (13).
Inventors:
Zuin Lisa Hung
Application Number:
JP14474297A
Publication Date:
November 10, 2010
Filing Date:
May 19, 1997
Export Citation:
Assignee:
Freescale Semiconductor, Inc.
International Classes:
G01P15/03; G01P15/093; B81B3/00; G01P1/02; G01P9/04; G01P15/08
Domestic Patent References:
| JP821852A | ||||
| JP2221812A | ||||
| JP6109759A | ||||
| JP730478A | ||||
| JP5713309A |
Other References:
EBRAHINABBASPOUR-SANI ET AL.,A NOVEL OPTICAL ACCELEROMETER,IEEE ELECTRON DEVICE LETTERS,1995年5月,VOL.16,NO.5,166-168頁
Attorney, Agent or Firm:
Atsushi Honda
Miho Ikegami
Miho Ikegami