Title:
OPTICAL SEMICONDUCTOR INSPECTING DEVICE
Document Type and Number:
Japanese Patent JPH02300639
Kind Code:
A
Abstract:
PURPOSE:To eliminate the need of correction for positional deviation and to omit the alignment of every silicon photodiode cell even when plural silicon photodiode cells exist by fetching the central part of a light beam and making it the uniform collimated beam of light. CONSTITUTION:The light emitted from a semiconductor laser light source 1 is condensed by a condensing lens 2 and passes through a pin hole 3. At such a time, the irregularly reflected light is cut. Since the light is radially expanded after passing through the pin hole 3, it is turned into the collimated beam of light by a collimating lens 4. Next, the beam diameter of the light is expanded by a beam expander 5 and the light is turned into the collimated beam of light by the collimating lens 6 to irradiate the silicon photodiode cell 8 in an element to be measured 7. Since the light is turned into the uniform collimated beam of light, an X-Y stage, etc., for alignment is not needed and an inexpensive high-speed inspecting device is obtained.
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Inventors:
KINOSHITA MASAKI
Application Number:
JP12311489A
Publication Date:
December 12, 1990
Filing Date:
May 16, 1989
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G01J1/00; H01L21/66; (IPC1-7): G01J1/00; H01L21/66
Attorney, Agent or Firm:
Masuo Oiwa (2 outside)