Title:
投影露光装置の照明デバイスの光学システム
Document Type and Number:
Japanese Patent JP5179077
Kind Code:
B2
Abstract:
The system has a light-conductance-increasing unit (100), which has a set of diffractive or refractive beam deflecting structures extending in a common direction (D1). The light-conductance-increasing unit has an optical uniaxial crystal material in such a manner that an optical crystal axis of the material is parallel or perpendicular to the direction. The unit (100) is arranged in such a manner that the optical crystal axis is perpendicular or parallel to a polarization direction of light striking at the unit (100). Independent claims are also included for: (a) a diffractive optical unit with a blazed grating (b) a method for microlithographically manufacturing a micro-structured unit (c) a micro-structured unit.
Inventors:
Karl-Heinz Schuster
Jurgen Hartmeier
Manfred Maul
Dieter Schmelek
Detlef Muller
Otto Hahnemann
Frank marianek
Goondula Weiss
Damian Fiorca
Jurgen Hartmeier
Manfred Maul
Dieter Schmelek
Detlef Muller
Otto Hahnemann
Frank marianek
Goondula Weiss
Damian Fiorca
Application Number:
JP2007064831A
Publication Date:
April 10, 2013
Filing Date:
March 14, 2007
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B5/02; G03F7/20; G03H1/08
Domestic Patent References:
| JP2003035822A | ||||
| JP2005268489A | ||||
| JP2003090959A | ||||
| JP2000206321A | ||||
| JP2005032909A | ||||
| JP2007506262A |
Foreign References:
| WO2005026822A1 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda