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Patent Searching and Data


Title:
OPTICAL SYSTEM AND ITS CONTROL METHOD
Document Type and Number:
Japanese Patent JP2008046361
Kind Code:
A
Abstract:

To provide an optical system achieving rapid observation by a confocal optical system.

The optical system 1 includes: the confocal optical system 3 to radiate illuminating light emitted from an illuminating light source 21 to a specimen 8 through a confocal minute aperture 34a so as to obtain passing light reflected by the specimen and passing through the confocal minute aperture 34a; a photodetector part 41 to detect the passing light; a displacement part 5 to displace the focal position of the confocal optical system to the specimen in an optical axis direction; and a processing part 60 to read and process detection data from the photodetector part 41 at a plurality of positions obtained by displacing the focal position. The optical system 1 is constituted so that the processing part may adjust the intensity of the light radiated to the specimen 8 based on the detection data read at the plurality of positions.


Inventors:
SUZUKI YASUO
Application Number:
JP2006221891A
Publication Date:
February 28, 2008
Filing Date:
August 16, 2006
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B21/00; G01B11/02
Attorney, Agent or Firm:
Masago Onishi