Title:
OPTICAL WAVEGUIDE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3950588
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a quartz optical waveguide device with extremely low polarization dependency and low loss, particularly, an array waveguide grating device.
SOLUTION: In a quartz optical waveguide device comprising a lower clad layer 2, a core 3, and an upper clad layer 4, which are formed on a Si substrate 1, the lower clad layer 2 and the upper clad layer 4 are formed of BPSG films (phosphor and boron-added quartz films). The lower and upper clad layers are formed by a heat treatment at 800-1000°C, and the sum of weight concentrations of elements P and B added to the film is within the range of 8.8 wt.% to 15 wt.% The slippage of transmitted central wavelength depending on polarization of the array waveguide grating device is 0.03 nm or less.
Inventors:
Tsuyoshi Shimoda
Application Number:
JP22946499A
Publication Date:
August 01, 2007
Filing Date:
August 13, 1999
Export Citation:
Assignee:
NEC
International Classes:
G02B6/13; G02B6/12; (IPC1-7): G02B6/13; G02B6/12
Domestic Patent References:
| JP11174246A | ||||
| JP10273340A | ||||
| JP10246826A | ||||
| JP519128A | ||||
| JP2001194541A |
Foreign References:
| WO1997025636A1 |
Other References:
S.M.Ojha et.al.,Electronics Letters,8th January 1998,Vol.34 No.1,p.78-79
G.Grand et.al., Electronics Letters, 6th December 1990, Vol.26 No.25 p.2135-2137
下田毅 et.al., 1996年電子情報通信学会総合大会講演論文集,1996年3月11日発行,エレクトロニクス1,p.230, C-230
G.Grand et.al., Electronics Letters, 6th December 1990, Vol.26 No.25 p.2135-2137
下田毅 et.al., 1996年電子情報通信学会総合大会講演論文集,1996年3月11日発行,エレクトロニクス1,p.230, C-230
Attorney, Agent or Firm:
Masahiko Desk
Naoki Shimosaka
Yasuhisa Tanizawa
Naoki Shimosaka
Yasuhisa Tanizawa