PURPOSE: To reduce vibration by not much being affected even when the looseness and friction, etc., exist in the mechanical system to be controlled, a non- linear element exists also in a servo system and a molding is not exactly performed, by determining an optinum orbit.
CONSTITUTION: Based on the detected value by laser displacement gauges 4, 5, a jerk value in addition to the speed and acceleration of a driving system composed of a table 2 and an actuator 3 and the relative displacement for the table 2 of a flexible structure 1 are defined as objects to be constrained, respectively, a driving signal u for driving the hydraulic actuator 3 is calculated and this signal is outputted to an orbit signal conversion part 8, in the orbit signal preparing part 7 of a control unit 6. In the orbit signal conversion part 8, a required processing such as the conversion of an engineering unit is performed and manupulated variable u is added to a D/A converter 9. A required amplification is performed for manupulated variable u outputted from the D/A converter 9 by an amplifier 10 and it is added as an actuator driving signal to the hydraulic actuator 3.
ITO HIROYUKI
MITSUTA SHINJI
