To provide an electroluminescent element that prevents deterioration by water or oxygen and is capable of improving reliability, and its manufacturing method.
The element part 10 on the substrate is covered by a barrier layer 20 at its surface. The barrier layer 20 seals the element part 10 and an organic layer P and an inorganic layer I are laminated alternately so as to shut off infiltration of water and oxygen. The inorganic layer I performs the function of mainly preventing transmission of water and oxygen and the organic layer P has sufficient elasticity and performs the function of suppressing stress by being provided between the inorganic layers I so that the inorganic layers I may not contact each other. When the barrier layer 20 is made multi-layered by thinning the thickness of one layer, the occurrence of cracks is prevented and the barrier performance is improved and flexibility for enduring deformation such as bending is provided. These organic layer P and inorganic layer I are formed by the vacuum dry process such as vacuum evaporation.
KITO HIDEYOSHI
KOBAYASHI MASATO
JPH10275680A | 1998-10-13 | |||
JPH1041067A | 1998-02-13 | |||
JP2000068050A | 2000-03-03 | |||
JP2001118674A | 2001-04-27 | |||
JP2000302960A | 2000-10-31 | |||
JP2001148287A | 2001-05-29 | |||
JP2002532850A | 2002-10-02 |
WO2000036665A1 | 2000-06-22 |
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