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Patent Searching and Data


Title:
ORGANIC SOLVENT DRYING DEVICE
Document Type and Number:
Japanese Patent JPH0227723
Kind Code:
A
Abstract:

PURPOSE: To perform sufficient dry in an organic solvent drying device by introducing the discharge tube of an evacuator into an article to be dried to form a flow of organic solvent paper by pressure reduction and replacing it with the paper.

CONSTITUTION: An article 10 to be dried is mounted in a drying tank 2. The end of a discharge tube 11 of an evacuator having a stream pump 7, a flowrate regulating valve 8 and a recovery tank 6 is guided into the article 10 to be dried. N2 or high pressure air is injected from the inner capillary of the pump 7 by the valve 8 to reduce the pressure at the end of the tube 11. Then, flows of organic solvent and paper are generated, the interior of the article 10 is replaced with paper of organic solvent, and the article 10 is completely dried when it passes between cooling coils 5.


Inventors:
KAMIMURA YASUO
TANIGAKI SUNAO
Application Number:
JP17642288A
Publication Date:
January 30, 1990
Filing Date:
July 15, 1988
Export Citation:
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Assignee:
DAN KAGAKU KK
International Classes:
F26B21/14; H01L21/304; (IPC1-7): F26B21/14; H01L21/304
Attorney, Agent or Firm:
Junnosuke Nakamura