Title:
ORIENTATION SYSTEM OF SEMICONDUCTOR WAFER
Document Type and Number:
Japanese Patent JPS6150342
Kind Code:
A
Abstract:
PURPOSE:To dispense with any miss-orientation making adjustment easier by a method wherein an orientation system is constituted so that a semiconductor wafer may be separated from a roller stopping the rotation of wafer to make it feasible to orient an orientation flat (OF) when the OF of a semiconductor wafer abuts against the roller. CONSTITUTION:When an OF abuts against a roller 2, the center of wafer is lowered to make the wafer abut against a flat sheet 14 located on the position apart from the roller 2 by the gap B. At this time, the wafer is going to rotate with increasing speed inclining rightward to abut against the flat sheet 14 inclined by an angle C making the left side of wafer slightly separate from the roller 2. resultantly the wafer stops rotation making the flat sheet 14 orient OF. Besides, the flat sheet 14 located on the position separated from the roller 2 by the gap A in the X direction may not come into contact with the wafer even if the OF of wafer abuts against the other roller 3 making the center of wafer deflect rightward.
Inventors:
SUGISHIMA KENJI
MIYAZAWA HITOSHI
MIYAZAWA HITOSHI
Application Number:
JP17362384A
Publication Date:
March 12, 1986
Filing Date:
August 20, 1984
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/68; H01L21/67; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Sadaichi Igita