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Title:
振動制御装置
Document Type and Number:
Japanese Patent JPH065190
Kind Code:
B2
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JP2860623[Title of Invention] Control device for vibration isolation table
JP3350588INDUSTRIAL APPLICABILITY A vibration control method using a cylindrical shell piezoelectric actuator and a device for the same.
Inventors:
UENO KAZUYOSHI
SAKAI ZENJI
Application Number:
JP25242888A
Publication Date:
January 19, 1994
Filing Date:
October 05, 1988
Export Citation:
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Assignee:
IMV KK
International Classes:
G05D19/02; G01M7/02; (IPC1-7): G01M7/02; G05D19/02
Domestic Patent References:
JPS63252430A
Attorney, Agent or Firm:
古谷 栄男



 
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