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Title:
OSCILLATION CIRCUIT AND VIBRATION TYPE SENSOR USING THE SAME
Document Type and Number:
Japanese Patent JP2012156946
Kind Code:
A
Abstract:

To provide an oscillation circuit capable of realizing stable oscillation of the oscillation circuit by reducing the effect of parasitic resistance and parasitic capacitance of a vibrator on the resonance characteristic (Q value, gain, etc.), with improved measurement accuracy of a vibration type sensor, and to provide the vibration type sensor using the same.

A current voltage conversion circuit which converts an output current signal of an electrostatic drive type vibrator (fixed electrode 1 and vibrator 3) to a voltage signal includes a calculation amplifier 14 and a negative impedance conversion circuit 10 equipped with resistors 11, 12, and 13.


Inventors:
OSHIMA AKIHIRO
Application Number:
JP2011016587A
Publication Date:
August 16, 2012
Filing Date:
January 28, 2011
Export Citation:
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Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
H03B5/30; G01L9/00; H01L29/84; H01L41/08; H01L41/18; H01L41/187; H03B5/36
Domestic Patent References:
JP2002174520A2002-06-21
JP2002368541A2002-12-20
JP2010268427A2010-11-25
JPS59161713U1984-10-30
JPH03254507A1991-11-13
JPH08204451A1996-08-09
JP2002174520A2002-06-21