Title:
OSCILLATION CIRCUIT AND VIBRATION TYPE SENSOR USING THE SAME
Document Type and Number:
Japanese Patent JP2012156946
Kind Code:
A
Abstract:
To provide an oscillation circuit capable of realizing stable oscillation of the oscillation circuit by reducing the effect of parasitic resistance and parasitic capacitance of a vibrator on the resonance characteristic (Q value, gain, etc.), with improved measurement accuracy of a vibration type sensor, and to provide the vibration type sensor using the same.
A current voltage conversion circuit which converts an output current signal of an electrostatic drive type vibrator (fixed electrode 1 and vibrator 3) to a voltage signal includes a calculation amplifier 14 and a negative impedance conversion circuit 10 equipped with resistors 11, 12, and 13.
Inventors:
OSHIMA AKIHIRO
Application Number:
JP2011016587A
Publication Date:
August 16, 2012
Filing Date:
January 28, 2011
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
H03B5/30; G01L9/00; H01L29/84; H01L41/08; H01L41/18; H01L41/187; H03B5/36
Domestic Patent References:
JP2002174520A | 2002-06-21 | |||
JP2002368541A | 2002-12-20 | |||
JP2010268427A | 2010-11-25 | |||
JPS59161713U | 1984-10-30 | |||
JPH03254507A | 1991-11-13 | |||
JPH08204451A | 1996-08-09 | |||
JP2002174520A | 2002-06-21 |