Title:
OSCILLATION REFLECTING MIRROR SUPPORTING MECHANISM
Document Type and Number:
Japanese Patent JPH02101422
Kind Code:
A
Abstract:
PURPOSE:To make the mirror supporting mechanism durable to prevent the breakage of the mechanism by fatigue failure by fitting plate springs so that the mechanism can be flexible in the rocking and rotating directions. CONSTITUTION:An oscillation reflecting mirror 1 is supported by one ends of two plate springs 3 which are fixed to the inner wall of a vacuum vessel 4 by the other ends and fitted in such a state where the length directions of the springs 3 are radially widened from the central axis 5 of rocking of the mirror 1. In other words, the springs 3 are fitted in the direction in which the rocking reflecting mirror 1 goes to flexible when the mirror 1 oscillates or rocks. Therefore, the stress produced in the plate springs can be reduced to a level below the limit of fatigue and the life of the spring plates can be extended.
Inventors:
KURODA HIDEHIKO
Application Number:
JP25617688A
Publication Date:
April 13, 1990
Filing Date:
October 11, 1988
Export Citation:
Assignee:
NEC CORP
International Classes:
G02B26/10; (IPC1-7): G02B26/10
Attorney, Agent or Firm:
Uchihara Shin