To solve the following problem: when opening an opening part of a large size to a partition of a clean room, a lot of clean air in the clean room flows out to the outside.
A pressure inside the clean room is set to be in a higher state than an air pressure outside the clean room. The partition of a boundary between the clean room and the outside is formed with the opening part. Pressurized air is supplied toward a direction shutting off the opening part from a spout provided on one side of the opening part. The supplied pressurized air is sucked by a suction port provided on the other side of the opening part. The air sucked by the suction port is made to pass a dust collector removing chemical substance or dust inside the air, and is newly circularly supplied from the spout provided on one side of the opening part.
IMON AKIHIRO
SAWASHIMA KENICHI
KOBAYASHI TETSUYA
Next Patent: SPACER FOR STEAM GENERATOR, AND STEAM GENERATOR