Title:
オーバリティ計測センサ
Document Type and Number:
Japanese Patent JP7119388
Kind Code:
B2
Abstract:
To provide an ovality measurement sensor that can eliminate battery replacement and can be used for a long time even under high temperatures.SOLUTION: Provided are: a pair of mounting parts that can be fixed at intervals in the circumferential direction of a cylindrical outer peripheral surface of a rotary furnace; an elastically deformable deformation plate suspended between both mounting parts; a support member that is fixed to the deformation plate between both mounting parts and supports the deformation plate by contacting the rotary furnace when both mounting parts are fixed to the rotary furnace; a strain gauge provided on the surface of the deformation plate and detecting the strain value of the deformed plate; a control unit that controls the strain gauge and communicates with external devices; and a thermoelectric converter for supplying power to the strain gauge and the control unit. The thermoelectric converter includes: an endothermic part that can contact the rotary furnace when both mounting parts are fixed to the rotary furnace; a thermoelectric power generation module provided on the side of the endothermic part opposite to the rotary furnace; and a radiator fixed to the surface opposite to the endothermic part of the thermoelectric generator module.SELECTED DRAWING: Figure 3
Inventors:
Tomohiro Mori
Hiroki Kamijo
Hideo Doi
Hiroki Kamijo
Hideo Doi
Application Number:
JP2018012230A
Publication Date:
August 17, 2022
Filing Date:
January 29, 2018
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
G01B7/16; F27B7/42; F27D21/00; H01L35/28
Domestic Patent References:
| JP201854591A | ||||
| JP2003168182A |
Other References:
OVALITY SENSOR User Manual,TomTom-Tools GmbH,2016年07月14日,
Attorney, Agent or Firm:
Masakazu Aoyama