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Patent Searching and Data


Title:
OVEN FOR BAKING COLORED RESIST
Document Type and Number:
Japanese Patent JPH11264665
Kind Code:
A
Abstract:

To provide an oven for baking colored resist while preventing adhesion of solidified sublimation gas in a process for baking an organic color filter.

The oven 1 for baking colored resist has an opening 30 for carrying a substrate material 12 having a patterned colored resist film 14 onto a substrate 10, and an opening 40 for carrying out the baked substrate material 12. A heater 50 is disposed closely to any one of the openings 30, 40. More specifically, the heater 50 is disposed on a shutter 60 for opening/closing the openings 30, 40 itself or around the exhaust opening of sublimation gas 14a.


Inventors:
NAKASO NOBUTAKA
Application Number:
JP7076398A
Publication Date:
September 28, 1999
Filing Date:
March 19, 1998
Export Citation:
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Assignee:
TOPPAN PRINTING CO LTD
International Classes:
F27B5/14; F27D7/06; (IPC1-7): F27B5/14; F27D7/06