Title:
OXIDE CERAMIC SINTERED COMPACT AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH06144920
Kind Code:
A
Abstract:
PURPOSE: To produce an oxide ceramic sintered compact nearly free from pores.
CONSTITUTION: Oxide ceramic powder having ≤1μm average particle size and ≥99% purity is compacted and sintered at 1,000-1,500°C in the air or in an inert or reducing atmosphere to produce the objective oxide ceramic sintered compact made of a single component. This sintered compact has ≤100 black spots per 1mm2 when it is polished, the resulting specular surface is pressed against buff sprinkled with carbon black and the surface is slid and observed with an optical microscope so as to count black spots.
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Inventors:
KISHI YUKIO
Application Number:
JP20995291A
Publication Date:
May 24, 1994
Filing Date:
July 26, 1991
Export Citation:
Assignee:
NIHON CEMENT
International Classes:
C04B35/00; C04B35/64; H01L23/15; (IPC1-7): C04B35/00; C04B35/64; H01L23/15
Attorney, Agent or Firm:
Nao Okuyama (4 outside)
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