Title:
OZONE FLOW CONTROLLER
Document Type and Number:
Japanese Patent JP3277987
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable the stable flow control of ozone by specifying the temp. of a N2-containing ozone gas passing through an ozone flow controller.
SOLUTION: In a state that air valves 2, 5 are opened and an ozonizer 1 is off before ozone gas flows, ozone gas controlled in flow rate by a mass flow meter (MFC) 7 for gas flow rate monitor and removed in water is fed to a normal pressure CVD chamber 8 and at the same time, the temp. of ozone line piping part is set at 60°C by a heater 13, a temp. sensor 14 and a temp. control part 15 and water portion stuck to the pipe line, air valves 5, 6 and inside surface of the MFC 7 is removed. Next, the temp. of the ozone line piping part is set at 47-60°C by the temp. control part 15 and the temp. of the MFC 7 is controlled at 47-60°C also when gaseous nitrogen flows in the MFC 7 in a state that the air valves 2, 3, 5, are closed, the ozonizer 1 is off and the air valve 6 is opened.
Inventors:
Atsushi Matsuwaka
Application Number:
JP14810797A
Publication Date:
April 22, 2002
Filing Date:
June 05, 1997
Export Citation:
Assignee:
NEC
International Classes:
C01B13/11; C01B13/00; C23C16/455; F16K49/00; G05D11/02; H01L21/205; (IPC1-7): C01B13/00; C01B13/11; C23C16/455; G05D11/02; H01L21/205
Domestic Patent References:
| JP684802A | ||||
| JP621010B2 |
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)
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