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Patent Searching and Data


Title:
P0LISHING METHOD AND MANUFACTURE OF WALTER TYPE OPTICAL ELEMENT USING THE POLISHING METHOD
Document Type and Number:
Japanese Patent JPH07164309
Kind Code:
A
Abstract:

PURPOSE: To let a polished surface be easily and accurately polished in a short time.

CONSTITUTION: A polishing member 6 possessing a magnetic substance is disposed in the polished surfaces 2 and 3 of a polished article 1, and attracting force due to magnetic force is produced between each magnetic force generating means 5a and 5b and the polishing member 6 by disposing the magnetic force generating means 5a and 5b at a position faced to the polishing member 6 via the polished article 1. And a magnetic force generating means 5 and the polished article 1 are relatively moved while attracting force is being controlled to be a specified value by conditioning the polishing member 6 to follow after the movement of each magnetic force generating means 5a and 5b.


Inventors:
UCHISHIBA EISHIROU
SHINADA KUNINORI
Application Number:
JP30895193A
Publication Date:
June 27, 1995
Filing Date:
December 09, 1993
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B17/00; B24B37/00; (IPC1-7): B24B37/00