Title:
制振層を備えるＰＭＵＴ超音波トランスデューサ
Document Type and Number:
Japanese Patent JP7344910
Kind Code:
B2
Abstract:
A PMUT ultrasound transducer includes a number of PMUT transmitting elements in a membrane layer. Behind each PMUT transmitting element is a cavity in the membrane layer. The cavities are partially or completely filled with a damping material to reduce ringing of the PMUT transmitting elements. Suitable damping materials include polymers, e.g., soft epoxies, benzocyclobutene or polyimide that are dispersed into the cavities or a phase changing material such as Parylene that precipitates out of a gas phase as a polymer when cured.
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Inventors:
Frey Greg
Reway
Reway
Application Number:
JP2020565402A
Publication Date:
September 14, 2023
Filing Date:
May 17, 2019
Export Citation:
Assignee:
FUJIFILM SonoSite Incorporated
International Classes:
H04R31/00; H04R17/00; H10N30/20; H10N30/30
Domestic Patent References:
| JP2008535643A | ||||
| JP2014503239A |
Foreign References:
| WO2007094254A1 |
Attorney, Agent or Firm:
Shinichiro Tanaka
▲吉▼田 和彦
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
▲吉▼田 和彦
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu