Title:
【発明の名称】圧電層の多層構造を有する圧電素子及びこの圧電素子の製造方法
Document Type and Number:
Japanese Patent JP2003502871
Kind Code:
A
Abstract:
The invention relates to a piezo-element comprising a multilayer structure of piezo-layers (2; 20) with electrodes (6, 7; 21, 22) arranged therebetween. The inventive piezo-element is provided with a mutual lateral contacting of said electrodes (6, 7; 21, 22) that is effected by outer electrodes (9, 10). The individual piezo-layers (4) are comprised of a continuous film (2; 20) which can be folded during production and which is partially or completely provided with the electrically conductive electrodes (6, 7; 21, 22). The piezo-layers (2, 20) are formed by folding said film at notches (5, 5.1, 5.2) placed at predetermined intervals in a manner that is transversal to the direction of folding, whereby the inner electrodes (6, 7; 21, 22) are formed by the metallized layers located on the inner side of the notches (5, 5.1, 5.2) after folding.
Inventors:
Bertram Zug
Friedrich becking
Friedrich becking
Application Number:
JP2001505075A
Publication Date:
January 21, 2003
Filing Date:
April 28, 2000
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
H01L41/047; H01L41/083; H01L41/293; H01L41/297; H02N2/04; (IPC1-7): H01L41/083; H01L41/22
Attorney, Agent or Firm:
Toshio Yano (4 outside)