Title:
【発明の名称】被処理体処理装置
Document Type and Number:
Japanese Patent JP2832724
Kind Code:
B2
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Inventors:
KAMIKAWA JUJI
MATSUMURA KIMIHARU
NOMURA MASAFUMI
NAGATA JUNICHI
MATSUMURA KIMIHARU
NOMURA MASAFUMI
NAGATA JUNICHI
Application Number:
JP15411789A
Publication Date:
December 09, 1998
Filing Date:
June 16, 1989
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
G03F7/36; H01L21/027; H01L21/18; H01L21/30; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; G03F7/36; H01L21/027
Domestic Patent References:
| JP61223839A | ||||
| JP6059078A | ||||
| JP60126833A | ||||
| JP61245529A | ||||
| JP6439718A | ||||
| JP63100715A |
Attorney, Agent or Firm:
Masami Sato