Title:
【発明の名称】レジストパターンの形成方法
Document Type and Number:
Japanese Patent JP2964533
Kind Code:
B2
Inventors:
TSUMORI TOSHIRO
Application Number:
JP8535990A
Publication Date:
October 18, 1999
Filing Date:
March 30, 1990
Export Citation:
Assignee:
SONII KK
International Classes:
G03F7/38; G03F7/038; G03F7/40; H01L21/027; (IPC1-7): G03F7/40; G03F7/038; G03F7/38; H01L21/027
Domestic Patent References:
JP5590945A | ||||
JP5766436A | ||||
JP5258374A |
Attorney, Agent or Firm:
Fujiya Shiga (1 person outside)