Title:
【発明の名称】圧電素子及びそれを用いた圧電アクチュエータ
Document Type and Number:
Japanese Patent JP2986706
Kind Code:
B2
Abstract:
PURPOSE: To provide a low-cost moisture-proof piezoelectric element in which internal stress is eliminated to prevent cracking. CONSTITUTION: In a piezoelectric element, an internal electrode 4 is formed estranging a specific space D from the end side 2A on a surface of a piezoelectric seat 2, whereby piezoelectric element plates 21 provided with a piezoelectric inactive region 24 are formed and a plurality of piezoelectric element plates are stacked. A shrinkage ratio adjustment thin film 28 is formed in the piezoelectric inactive region of the piezoelectric element plates. Thus, shrinkage states of the piezoelectric seats in the piezoelectric inactive region and piezoelectric active region are approximately the same and a generation of an internal stress is suppressed to prevent a generation of cracks, etc.
Inventors:
WATABE YOSHUKI
SADAMURA SHIGERU
SOMETSUGU TAKAHIRO
SADAMURA SHIGERU
SOMETSUGU TAKAHIRO
Application Number:
JP7077195A
Publication Date:
December 06, 1999
Filing Date:
March 03, 1995
Export Citation:
Assignee:
HITACHI KINZOKU KK
International Classes:
H04R17/00; H01L41/083; H03H9/02; (IPC1-7): H01L41/083; H03H9/02; H04R17/00
Domestic Patent References:
| JP2237083A |
Attorney, Agent or Firm:
Akihiro Asai