Title:
【発明の名称】CMOS半導体装置の製造方法
Document Type and Number:
Japanese Patent JP3182769
Kind Code:
B2
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Inventors:
Satoshi Inoue
Application Number:
JP576891A
Publication Date:
July 03, 2001
Filing Date:
January 22, 1991
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L27/092; H01L21/336; H01L21/8238; H01L27/12; H01L29/78; H01L29/786; (IPC1-7): H01L29/786; H01L21/336; H01L27/092
Domestic Patent References:
| JP284772A |
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)