Title:
【発明の名称】洗浄装置の排水終了検知方法
Document Type and Number:
Japanese Patent JPH0684977
Kind Code:
B2
Inventors:
MATSUI SHOICHI
TAMAE SADAYUKI
KIUCHI MITSUSACHI
TAMAE SADAYUKI
KIUCHI MITSUSACHI
Application Number:
JP19595987A
Publication Date:
October 26, 1994
Filing Date:
August 05, 1987
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01P13/00; G05D9/00; (IPC1-7): G01P13/00; G05D9/00
Domestic Patent References:
| JPS6024422A | ||||
| JPS6082075A | ||||
| JPS5777968A |
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
Next Patent: JIG FOR VACUUM-CHUCKING BARE CHIP SEMICONDUCTOR CHIP