Title:
MANUFACTURE OF MICROMACHINED DEVICE TO CONTAIN OR CONVEY FLUID AND DEVICE MANUFACTURED THEREBY
Document Type and Number:
Japanese Patent JPH0719170
Kind Code:
A
Abstract:
PURPOSE: To provide a process for manufacturing a micromachined device capable of ensuring the superior bonding of a silicon body of a device and glass closing plates, and simultaneously protecting an oxide layer on a surface exposed to the fluid.
CONSTITUTION: The surfaces of a member 4 used as a silicon body to be contacted with the closing plates 1, 5 are coated with shield layers so as to be durable against a machining process, prior to the machining process. After this process, the surface of the member exposed to the fluid is oxidized to form an oxide layer inside for accelerating the wettability of the surface. Then the shield layers are removed, and the closing plates are mounted on the member.
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Inventors:
NIKORASU FURANSU DOU ROOI
SHIRUBUAN JIYANERE
FUORUKAA GASU
BAATO BUAN DERU SHIYUUTO
SHIRUBUAN JIYANERE
FUORUKAA GASU
BAATO BUAN DERU SHIYUUTO
Application Number:
JP12333394A
Publication Date:
January 20, 1995
Filing Date:
May 13, 1994
Export Citation:
Assignee:
UNIV DE NUUSHIYATERU
International Classes:
A61J3/00; A61M1/14; F04B43/04; H01L21/306; (IPC1-7): F04B43/04; A61J3/00; H01L21/306
Attorney, Agent or Firm:
Masaki Yamakawa
Next Patent: REFRIGERANT COMPRESSING DEVICE