Title:
パーティクル除去方法および熱処理装置
Document Type and Number:
Japanese Patent JP6975596
Kind Code:
B2
Abstract:
When a chamber of a heat treatment apparatus is opened for a purpose such as maintenance of the heat treatment apparatus, particles flow in large quantities into the chamber together with an outside atmosphere. After maintenance work is finished, an enclosed space is formed in the chamber and gas in the chamber is exhausted to place the interior of the chamber in a reduced-pressure atmosphere. While the interior of the chamber is in the reduced-pressure atmosphere, the interior of the chamber is irradiated with a flash of light emitted multiple times from a flash lamp to cause momentary gas expansion and subsequent gas shrinkage repeatedly, thereby causing particles adhering in the chamber to fly. The flying particles are discharged from the chamber to remove the particles.
Inventors:
Masashi Furukawa
Application Number:
JP2017180195A
Publication Date:
December 01, 2021
Filing Date:
September 20, 2017
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/26; F27B17/00; F27D11/02
Domestic Patent References:
| JP2017045982A | ||||
| JP2005072291A | ||||
| JP2011097068A | ||||
| JP2013207033A | ||||
| JP2017045983A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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