To provide a parts cleaning and drying method in which drying efficiency is improved to enable shortening of drying time in a vacuum drying process as compared with conventional methods and a device for the method.

There is provided a parts cleaning and drying method in which an object to be processed is contained in a cleaning and drying tank and subjected to a immersion cleaning process for immersing the object to be processed in a cleaning solvent and cleaning it by applying ultrasonic vibration, a steam cleaning process for steam cleaning the object to be processed by introducing heated steam of the cleaning solvent to the cleaning and drying tank, and a vacuum drying process for drying the steam-cleaned object to be processed under reduced pressure. In the vacuum drying process, low pressure vacuum drying is carried out by reducing the pressure in the cleaning and drying tank to a threshold of vacuum pump, and thereafter the pressure is free of the threshold of vacuum pump and restored to the pressure lower than an explosion lower limit of the cleaning solvent, and after elapse of a predetermined period of time low pressure vacuum drying is carried out in the tank again.