Title:
パターン寸法算出方法、及び画像解析装置
Document Type and Number:
Japanese Patent JP5695716
Kind Code:
B2
Inventors:
Akiyuki Sugiyama
Ryoichi Matsuoka
Akihiro Onisawa
Takeshi Kakinuma
Ryoichi Matsuoka
Akihiro Onisawa
Takeshi Kakinuma
Application Number:
JP2013198199A
Publication Date:
April 08, 2015
Filing Date:
September 25, 2013
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01B15/00; G01B15/04
Domestic Patent References:
| JP52098557A | ||||
| JP61091659A | ||||
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| JP6129829A | ||||
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| JP2009014519A |
Foreign References:
| WO1994022037A1 | ||||
| US5966677 | ||||
| WO2008032488A1 |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe