Title:
パターン形成方法およびパターン形成用多層膜
Document Type and Number:
Japanese Patent JP4016765
Kind Code:
B2
Inventors:
Haruo Iwasawa
Akihiro Hayashi
Tsutomu Shimokawa
Kazuo Kawaguchi
Masato Tanaka
Akihiro Hayashi
Tsutomu Shimokawa
Kazuo Kawaguchi
Masato Tanaka
Application Number:
JP2002244094A
Publication Date:
December 05, 2007
Filing Date:
August 23, 2002
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/075; G03F7/11; C08F32/08; C08G10/02; C08G77/14; G03F7/039; G03F7/26; H01L21/027
Domestic Patent References:
| JP2001040293A | ||||
| JP11130860A | ||||
| JP2000143937A |
Attorney, Agent or Firm:
Toshiaki Fukuzawa