Title:
レーザーを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5236557
Kind Code:
B2
Inventors:
Naoki Yoneda
Nobuyuki Suzuki
Masahisa Kakinuma
Junichi Ikeno
Nobuyuki Suzuki
Masahisa Kakinuma
Junichi Ikeno
Application Number:
JP2009087332A
Publication Date:
July 17, 2013
Filing Date:
March 31, 2009
Export Citation:
Assignee:
Taiyo Holdings Co., Ltd.
Saitama University
Saitama University
International Classes:
G03F7/36; G03F7/004; G03F7/038; G03F7/38; H01J9/02; H01J9/20; H01J11/22; H01J11/34; H01J11/38; H01J11/44
Domestic Patent References:
| JP2008146042A | ||||
| JP2008146041A | ||||
| JP2008233421A | ||||
| JP2006128055A | ||||
| JP11338130A |
Foreign References:
| WO2007007802A1 | ||||
| WO2007007800A1 |
Attorney, Agent or Firm:
Amagi International Patent Office