Title:
レーザーを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5561989
Kind Code:
B2
More Like This:
| JP2006024715 | LITHOGRAPHY APPARATUS AND PATTERN FORMING METHOD |
| WO/2023/168892 | OPTICAL DETECTION DEVICE AND DETECTION METHOD |
| JPH07106221 | MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT |
Inventors:
Naoki Yoneda
Nobuyuki Suzuki
Junichi Ikeno
Nobuyuki Suzuki
Junichi Ikeno
Application Number:
JP2009230809A
Publication Date:
July 30, 2014
Filing Date:
October 02, 2009
Export Citation:
Assignee:
Taiyo Holdings Co., Ltd.
Saitama University
Saitama University
International Classes:
G03F7/20; H01J9/02; H01J11/22; H01J11/34; H01J11/44; H01L21/027
Domestic Patent References:
| JP3155004A | ||||
| JP8017704A | ||||
| JP8220767A | ||||
| JP11038516A | ||||
| JP11338130A | ||||
| JP2001023929A | ||||
| JP2005195715A | ||||
| JP2006186138A | ||||
| JP2008032935A | ||||
| JP2008108724A | ||||
| JP2008122673A | ||||
| JP2008146041A | ||||
| JP2008146042A | ||||
| JP2009086280A | ||||
| JP2010161251A | ||||
| JP2010237573A |
Foreign References:
| WO2005096101A1 |
Attorney, Agent or Firm:
Amagi International Patent Office